dtЦифровая трансформацияDigital Transformation2522-96132524-2822Educational Establishment “Belarusian State University of Informatics and Radioelectronics”10.35596/1729-7648-2023-29-1-72-80dt-743Research ArticleТЕХНИЧЕСКИЕ НАУКИTECHNICAL SCIENCESПрименение систем автоматизированного проектирования для учета механических напряжений при разработке неохлаждаемых тепловых детекторов болометрического типаApplication of Cad Systems to Accounting for Mechanical Stresses in the Development of Uncooled Thermal Detectors of the Bolometric TypeЧиеуЧан ВанTrieuTran Van

Чан Ван Чиеу, аспирант кафедры микро- и наноэлектроники

Минск

Tran Van Trieu, Postgraduate at the Departmentof Micro- and Nanoelectronics  

Minsk

ЛовшенкоИ. Ю.LovshenkoI. Yu.

Ловшенко И. Ю., заведующий научно-исследова­тельской лабораторией «Компьютерное проектирование микро- и наноэлектронных систем» НИЧ

220013, г. Минск, ул. П. Бровки, 6

Lovshenko I. Yu., Head of the Research Laboratory “CAD in Micro- and Nanoelectronics” at the R&D Department

220013, Minsk, P. Brovki St., 6

lovshenko@bsuir.byСтемпицкийВ. Р.StempitskyV. R.

Стемпицкий В. Р., к. т. н, доцент, проректор по научной работе, научный руководитель  научно-исследовательской лаборатории «Компьютерное проектирование микро- и наноэлектронных систем» НИЧ

Минск

Stempitsky V. R., Cand. of Sci., Associate Professor, Vice-Rector for Research and Development, Adviser ofthe Research Laboratory “CAD in Micro- and Nanoelectronics” at the R&D Department

Minsk

КорсакК. В.KorsakK. V.

Корсак К. В., магистрант кафедры микро - и наноэлектроники

Минск

Korsak K. V., Master’s Student at the Departmentof Micro- and Nanoelectronics

Minsk

ЧунгЧан ТуанTrungTran Tuan

Чан Туан Чунг, к. т. н. 

Tran Tuan Trung, Cand. of Sci. 

ХаДао ДиньHaDao Dinh

Дао Динь Ха, к. т. н

Dao Dinh Ha, Cand. of Sci.

КолосВ. В.KolosV. V.

Колос В. В., заместитель заведующего отраслевойлабораторией новых технологий и материалов

Минск

Kolos V. V., Deputy Head of the Industry Laboratoryof New Technologies and Materials

Minsk

Белорусский государственный университет информатики и радиоэлектроникиBelarusian State University of Informatics and RadioelectronicsВьетнамский государственный технический университет имени Ле Куй ДонаLe Quy Don University of Science and TechnologyОАО «ИНТЕГРАЛ» – управляющая компания холдинга «ИНТЕГРАЛ»JointStock Company “INTEGRAL”– Manager Holding Company “INTEGRAL”2023290320232917280Copyright © Чиеу Ч., Ловшенко И.Ю., Стемпицкий В.Р., Корсак К.В., Чунг Ч., Ха Д., Колос В.В., 20232023Чиеу Ч., Ловшенко И.Ю., Стемпицкий В.Р., Корсак К.В., Чунг Ч., Ха Д., Колос В.В.Trieu T., Lovshenko I.Y., Stempitsky V.R., Korsak K.V., Trung T., Ha D., Kolos V.V.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://dt.bsuir.by/jour/article/view/743

В статье приведен сравнительный анализ характеристик основных типов болометров. Исследовано конструктивное решение неохлаждаемого теплового детектора болометрического типа, сформированного по технологии микроэлектромеханических систем. Посредством компьютерного моделирования в современных системах автоматизированного проектирования в микроэлектронике для оценки влияния механических напряжений, возникающих в конструктивных материалах при их формировании, на величину деформации выполнен статический механический анализ. Установлено, что для обеспечения нормального функционирования микроболометра (уменьшения максимального отклонения пленки от номинального значения) необходимо уменьшить внутренние механические напряжения в пленке NiCr. Для пленок Si3N4, напротив, это значение следует увеличивать.

A comparative analysis of the characteristics of the main types of bolometers is indicated in the article. The constructive solution of an uncooled thermal detector of the bolometric type, formed using the technology of microelectromechanical systems, is studied. By means of computer simulation in modern computer-aided design systems in microelectronics, a static mechanical analysis was performed to assess the effect of mechanical stresses arising in structural materials during their formation on the magnitude of deformation. It has been established that to ensure the normal functioning of the microbolometer (to reduce the maximum deviation value of the film from the nominal value), it is necessary to reduce the internal mechanical stresses in the NiCr film. For the Si3N4 films, on the contrary, this value should be increased.

интегральный неохлаждаемый тепловой детектормикроболометрмоделированиемеханические напряжениядеформацияintegral uncooled thermal detectormicrobolometermodelingmechanical stressesdeformationReferencesWood R. A., Han C. J., Kruse P. W. (1992) Integrated Uncooled Infrared Detector Imaging Arrays. Solid-State Sensor and Actuator Workshop, 5th Technical Digest, IEEE. 132–135.Wood R. A., Han C. J., Kruse P. W. (1992) Integrated Uncooled Infrared Detector Imaging Arrays. Solid-State Sensor and Actuator Workshop, 5th Technical Digest, IEEE. 132–135.Takamuro D., Tomohiro M., Takaki S. (2011) Development of New SOI Diode Structure for Beyond 17-umPixel Pitch SOI Diode Uncooled IRFPAs. Proceedings of SPIE – the International Society for Optical Engineering. (8012), 80121E.Takamuro D., Tomohiro M., Takaki S. (2011) Development of New SOI Diode Structure for Beyond 17-umPixel Pitch SOI Diode Uncooled IRFPAs. Proceedings of SPIE – the International Society for Optical Engineering. (8012), 80121E.Li C., Han C. J., Skidmore G. D., Hess C. (2010) DRS Uncooled VOx Infrared Detector Development and Production Status. Proc SPIE. (7660), 76600V.Li C., Han C. J., Skidmore G. D., Hess C. (2010) DRS Uncooled VOx Infrared Detector Development and Production Status. Proc SPIE. (7660), 76600V.Kolovsky A. A., Levitsky A. A., Marinushkin P. S. (2008) Computer Modeling of MEMS Components. Problems of Development of Promising Micro- and Nanoelectronic Systems. (1), 398.Kolovsky A. A., Levitsky A. A., Marinushkin P. S. (2008) Computer Modeling of MEMS Components. Problems of Development of Promising Micro- and Nanoelectronic Systems. (1), 398.Flannery R. E., Miller J. E. (1989) Status of Uncooled Infrared Imagers. Journals of SPIE. (1), 379.Flannery R. E., Miller J. E. (1989) Status of Uncooled Infrared Imagers. Journals of SPIE. (1), 379.Downey P. M., Jeffries A. D., Meyer S. S., Weiss R., Bachner F. J., Donnelly J. P., Lindley W. T., MountainR.W., Silversmith D. J. S. (1984) Monolithic Silicon Bolometers. Appl. Opt. (23), 14.Downey P. M., Jeffries A. D., Meyer S. S., Weiss R., Bachner F. J., Donnelly J. P., Lindley W. T., MountainR.W., Silversmith D. J. S. (1984) Monolithic Silicon Bolometers. Appl. Opt. (23), 14.Liddiard K. C. (1993) Thin Film Monolithic Arrays for Uncooled Thermal Imaging. Proc. SPIE. (16), 206.Liddiard K. C. (1993) Thin Film Monolithic Arrays for Uncooled Thermal Imaging. Proc. SPIE. (16), 206.Unewisse M. H., Passmore S. J., Liddiard K. C., Watson R. J. (1994) Performance of Uncooled Semiconductor Film Bolometer Infrared Detectors. Proc. SPIE. (43), 52.Unewisse M. H., Passmore S. J., Liddiard K. C., Watson R. J. (1994) Performance of Uncooled Semiconductor Film Bolometer Infrared Detectors. Proc. SPIE. (43), 52.Wood R. A. (1993) High-Performance Infrared Thermal Imaging with Monolithic Silicon Focal Planes Operating at Room Temperature. Technical Digest. (77), 175.Wood R. A. (1993) High-Performance Infrared Thermal Imaging with Monolithic Silicon Focal Planes Operating at Room Temperature. Technical Digest. (77), 175.Cole B. E., Higashi R. E., Wood R. A. (2000) Micromachined Pixel Arrays Integrated with CMOS for Infrared Applications. Int. Conf. on Optical MEMS, IEEE. 63.Cole B. E., Higashi R. E., Wood R. A. (2000) Micromachined Pixel Arrays Integrated with CMOS for Infrared Applications. Int. Conf. on Optical MEMS, IEEE. 63.Syllaios A. J., Schimert T. R., Gooch R. W., McCardel W. L., Ritchey B. A., Tregilgas J. H. (2000) Amorphous Silicon Microbolometer Technology. Proc. Mater. Res. Soc., San Francisco, CA, USA. 609, A14.4.Syllaios A. J., Schimert T. R., Gooch R. W., McCardel W. L., Ritchey B. A., Tregilgas J. H. (2000) Amorphous Silicon Microbolometer Technology. Proc. Mater. Res. Soc., San Francisco, CA, USA. 609, A14.4.Mottin E., Astrid B., Jean-Luk M. (2003) Uncooled Amorphous Silicon Technology Enhancement for 25-umPixel Pitch Achievement Proc. SPIE Infrared Technology and Applications XXVIII, Seattle USA. 4820, 200.Mottin E., Astrid B., Jean-Luk M. (2003) Uncooled Amorphous Silicon Technology Enhancement for 25-umPixel Pitch Achievement Proc. SPIE Infrared Technology and Applications XXVIII, Seattle USA. 4820, 200.Jerominek H., Picard F., Vincent D. (1993) Vanadium Oxide Films for Optical Switching and Detection. Opt. Eng. (32), 99.Jerominek H., Picard F., Vincent D. (1993) Vanadium Oxide Films for Optical Switching and Detection. Opt. Eng. (32), 99.KuŹma E. (1993) Contribution to the Technology of Critical Temperat. Resistors. Electron Technol. 26 (2/3), 129.KuŹma E. (1993) Contribution to the Technology of Critical Temperat. Resistors. Electron Technol. 26 (2/3), 129.Jerominek H., Pope T. D., Renaud M., Swart N. R., Picard F., Lehoux M., Savard S. (1997) 64×64, 128×128 and 240×320 Pixel Uncooled IR Bolometric Detector Arrays. Proc. SPIE. (30), 47.Jerominek H., Pope T. D., Renaud M., Swart N. R., Picard F., Lehoux M., Savard S. (1997) 64×64, 128×128 and 240×320 Pixel Uncooled IR Bolometric Detector Arrays. Proc. SPIE. (30), 47.Chen C., Yi X., Zhang J., Xiong B. (2001) Micromachined Uncooled IR Bolometer Linear Array Using VO2 Thin Films. Int. J. Infrared Millim. Waves. (22), 53.Chen C., Yi X., Zhang J., Xiong B. (2001) Micromachined Uncooled IR Bolometer Linear Array Using VO2 Thin Films. Int. J. Infrared Millim. Waves. (22), 53.Niklaus F., Vieider C., Jakobsen H. (2007) MEMS-based Uncooled Infrared Bolometer Arrays: a Review. Proc. SPIE. (68), 36.Niklaus F., Vieider C., Jakobsen H. (2007) MEMS-based Uncooled Infrared Bolometer Arrays: a Review. Proc. SPIE. (68), 36.Soltani M., Chaker M., Haddad E., Kruzelecky R. V., Margot J. (2004) Effects of Ti-W Codoping on the Optical and Electrical Switching of Vanadium Dioxide Thin Films Grown by a Reactive Pulsed Laser Deposition. Appl. Phys. Lett. (85), 60.Soltani M., Chaker M., Haddad E., Kruzelecky R. V., Margot J. (2004) Effects of Ti-W Codoping on the Optical and Electrical Switching of Vanadium Dioxide Thin Films Grown by a Reactive Pulsed Laser Deposition. Appl. Phys. Lett. (85), 60.Han Y. H., Kim K. T., Shin H. J., Moon S. (2005) Enhanced Characteristics of an Uncooled Microbolometer Using Vanadium-Tungsten Oxide as a Thermoelectric Material. Appl. Phys. Lett. (86), 3.Han Y. H., Kim K. T., Shin H. J., Moon S. (2005) Enhanced Characteristics of an Uncooled Microbolometer Using Vanadium-Tungsten Oxide as a Thermoelectric Material. Appl. Phys. Lett. (86), 3.Syllaios A. J., Schimert T. R., Gooch R. W., McCardel W. L., Ritchey B. A., Tregilgas J. H. (2000) Amorphous Silicon Microbolometer Technology. MRS Proc. (14), 6.Syllaios A. J., Schimert T. R., Gooch R. W., McCardel W. L., Ritchey B. A., Tregilgas J. H. (2000) Amorphous Silicon Microbolometer Technology. MRS Proc. (14), 6.Liddiard K. C., Ringh U., Jansson C., Reinhold O. (1998) Progress of Swedish-Australian Research Collaboration on Uncooled Smart IR Sensors. Proc. SPIE. (34), 84.Liddiard K. C., Ringh U., Jansson C., Reinhold O. (1998) Progress of Swedish-Australian Research Collaboration on Uncooled Smart IR Sensors. Proc. SPIE. (34), 84.Tisse C.-L., Tissot J.-L., Crastes A. (2012) An Information-Theoretic Perspective on the Challenges and Advances in the Race Toward 12 μm Pixel Pitch Megapixel Uncooled Infrared Imaging. Proc. SPIE. (8353), 83531M-1.Tisse C.-L., Tissot J.-L., Crastes A. (2012) An Information-Theoretic Perspective on the Challenges and Advances in the Race Toward 12 μm Pixel Pitch Megapixel Uncooled Infrared Imaging. Proc. SPIE. (8353), 83531M-1.Wang J., Li W., Gou J., Wu Z., Jiang Y. (2014) Fabrication and Parameters Calculation of Room Temperature Terahertz Detector with Micro-bridge Structure. J. Infrared Milli Terahertz Waves. 35 (12), 987–1082.Wang J., Li W., Gou J., Wu Z., Jiang Y. (2014) Fabrication and Parameters Calculation of Room Temperature Terahertz Detector with Micro-bridge Structure. J. Infrared Milli Terahertz Waves. 35 (12), 987–1082.Safy M., Zaky A. H., Mitkes A. (2008) Thermal Modeling of a High Fill-factor Micromachined Bolometer for Thermal Imaging Applications. ICEENG The International Conference on Electrical Engineering. 6.Safy M., Zaky A. H., Mitkes A. (2008) Thermal Modeling of a High Fill-factor Micromachined Bolometer for Thermal Imaging Applications. ICEENG The International Conference on Electrical Engineering. 6.Malm G. B. (2012) Micromechanical Process Integration and Material Optimization for High Performance Silicon-Germanium Bolometers. MRS Online Proceedings Library. 1437.Malm G. B. (2012) Micromechanical Process Integration and Material Optimization for High Performance Silicon-Germanium Bolometers. MRS Online Proceedings Library. 1437.Varpula A. (2021) Nano-Thermoelectric Infrared Bolometers. APL Photonics. 036111.Varpula A. (2021) Nano-Thermoelectric Infrared Bolometers. APL Photonics. 036111.Chiang S.-Y. (2020) 2D Material-Enabled Nanomechanical Bolometer. Nano Letters. 2326–2331.Chiang S.-Y. (2020) 2D Material-Enabled Nanomechanical Bolometer. Nano Letters. 2326–2331.

The authors declare that there are no conflicts of interest present.